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SEMI E120-0310 - Specification for the Common Equipment Model (CEM)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 16, 2009. Initially available at www.semi.org in February 2010. Originally published March 2003; previously published November 2008.


The purpose of this specification is to provide a generally applicable object model of semiconductor equipment structure and related elements. This object model is intended to be used in the following ways: As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host; As a base model to be used and extended by other SEMI equipment communication standards; As a reference for the creation of technology-specific object model definitions, such as XML schema.


Subordinate Document:

SEMI E120.1-0310 - XML Schema for the Common Equipment Model (CEM)

Referenced SEMI Standards
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

Revision History

SEMI E120-0310 (technical revision)

SEMI E120-1108 (technical revision)

SEMI E120-0706 (technical revision)

SEMI E120-0705E (editorial revision)

SEMI E120-1104E (editorial revision)

SEMI E120-0704 (technical revision)

SEMI E120-0304 (technical revision)

SEMI E120-0703 (technical revision)

SEMI E120-0303 (first published)


SEMI E120.1-0310 (technical revision)

SEMI E120.1-1108 (technical revision)

SEMI E120.1-0706 (technical revision)

SEMI E120.1-0705 (technical revision)

SEMI E120.1-1104 (technical revision)

SEMI E120.1-0704 (first published)

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