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SEMI International Standards

SEMI E39-0703 (Reapproved 1109) - Object Services Standard: Concepts, Behavior, and Services

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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SUPERSEDED - Replaced by a newer version.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

Revision History

SEMI E39-0703 (Reapproved 1109)

SEMI E39-0703 (technical revision)

SEMI E39-1102 (technical revision)

SEMI E39-1101 (technical revision)

SEMI E39-0697 (technical revision)

SEMI E39-0600 (technical revision)

SEMI E39-95 (first published)


SEMI E39.1-0703 (Reapproved 1109)

SEMI E39.1-0703 (technical revision)

SEMI E39.1-1102 (technical revision)

SEMI E39.1-1101 (technical revision)

SEMI E39.1-1296 (technical revision)

SEMI E39.1-95 (first published)

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