This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008. Originally published in 1995.

NOTICE: The designation of SEMI E37 was updated during the 1109 publishing cycle to reflect the withdrawal of SEMI E37.2.

HSMS provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another.

Subordinate Documents:

SEMI E37.1-0702 (Reapproved 0308) — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E37.2-95 (Withdrawn 1109) — High-Speed SECS Message Services General Session (HSMS-GS)

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E37-1109 (designation update)

SEMI E37-0308 (Reapproved 0708)

SEMI E37-0308 (designation update)

SEMI E37-0303 (designation update)

SEMI E37-0702 (technical revision)

SEMI E37-0298 (technical revision)

SEMI E37-95 (first published)

SEMI E37.1-0702 (Reapproved 0308)

SEMI E37.1-0702 (technical revision)

SEMI E37.1-96E (editorial revision)

SEMI E37.1-95 (first published)

SEMI E37.2-95 (Withdrawn 1109)

SEMI E37.2-95 (Reapproved 0303)

SEMI E37.2-95 (first published)