This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009. Originally published in 1991; previously published July 2006.

This safety guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI F15 — Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S3 — Safety Guideline for Process Liquid Heating System
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Guidelines for Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

SEMI S2-0709 (technical revision)

SEMI S2-0706e (delayed revision)

SEMI S2-0706d (delayed revision)

SEMI S2-0706c (delayed revision)

SEMI S2-0706b (delayed revision)

SEMI S2-0706a (delayed revision)

SEMI S2-0706E (editorial revision)

SEMI S2-0706 (technical revision)

SEMI S2-0703aE (editorial revision)

SEMI S2-0703a (delayed revision)

SEMI S2-0703 (technical revision)

SEMI S2-0303 (technical revision)

SEMI S2-1102 (technical revision)

SEMI S2-0302 (technical revision)

SEMI S2-0200E (editorial revision)

SEMI S2-0200 (complete rewrite)

SEMI S2-93A (technical revision)

SEMI S2-93 (technical revision)

SEMI S2-91 (first published)