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SEMI T7-0303 (Reapproved 0709) - Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol

Volume(s): Traceability
Language: English
Type: Single Standards Download (.pdf)
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Status
CURRENT - Supported by the technical committee.


Abstract

This standard was technically approved by the global Traceability Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009. Originally published in 1997; previously published March 2003.

 

This specification is intended to provide a marking symbology that can be used to mark silicon wafers with no intrusion into the fixed quality area of the wafer.


Referenced SEMI Standards
SEMI M1.15 — Standard for 300 mm Polished Monocrystalline Silicon Wafers (Notched)


Revision History

SEMI T7-0303 (Reapproved 0709)

SEMI T7-0303 (technical revision)

SEMI T7-1102 (technical revision)

SEMI T7-0302 (technical revision)

SEMI T7-0997E3 (editorial revision)

SEMI T7-0997E2 (editorial revision)

SEMI T7-0997E (editorial revision)

SEMI T7-0997 (first published)


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