This standard was technically approved by the global Traceability Committee.
This edition was approved for publication by the global Audits & Reviews
Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009.
Originally published in 1997; previously published March 2003.
This specification is intended to provide a marking symbology that can be
used to mark silicon wafers with no intrusion into the fixed quality area of the
SEMI T7-0303 (Reapproved 0709)
SEMI T7-0303 (technical revision)
SEMI T7-1102 (technical revision)
SEMI T7-0302 (technical revision)
SEMI T7-0997E3 (editorial revision)
SEMI T7-0997E2 (editorial revision)
SEMI T7-0997E (editorial revision)
SEMI T7-0997 (first published)