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SEMI Downloads
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Volumes(s): Traceability
Language: English
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SEMI T7-0303 (Reapproved 0709) - Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This standard was technically approved by the global Traceability Committee.
This edition was approved for publication by the global Audits & Reviews
Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009.
Originally published in 1997; previously published March 2003.
This specification is intended to provide a marking symbology that can be
used to mark silicon wafers with no intrusion into the fixed quality area of the
wafer. |
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Referenced SEMI Standards |
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SEMI M1.15 — Standard for 300 mm Polished Monocrystalline Silicon Wafers
(Notched) |
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Revision History: |
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SEMI T7-0303 (Reapproved 0709)
SEMI T7-0303 (technical revision)
SEMI T7-1102 (technical revision)
SEMI T7-0302 (technical revision)
SEMI T7-0997E3 (editorial revision)
SEMI T7-0997E2 (editorial revision)
SEMI T7-0997E (editorial revision)
SEMI T7-0997 (first published) |
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