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SEMI C64-0308 - SEMI Statistical Guidelines for Ship To Control

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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SUPERSEDED - Replaced by a newer version.


This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008.


To provide a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining Ship to Control (STC) limits.

Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits

Revision History
SEMI C64-0308 (first published)

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