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SEMI Downloads
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Volumes(s): Process Chemicals
Language: English
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SEMI C64-0308 - SEMI Statistical Guidelines for Ship To Control |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This standard
was technically approved by the global Liquid Chemicals Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on
December 20, 2007. It was available at www.semi.org in February 2008.
To provide a
set of guidelines for the quantitative determination of statistically derived
limits from process data for the purpose of defining and maintaining Ship to
Control (STC) limits. |
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Referenced SEMI Standards |
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SEMI C10 —
Guide for Determination of Method Detection Limits
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Revision History: |
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SEMI
C64-0308 (first published) |
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