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SEMI E22-0697 (Reapproved 0309) - Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on January 2, 2009. It was available at www.semi.org in February 2009. Originally published in 1991; previously published June 1997.


The purpose of the standard is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference.


Subordinate Document:

SEMI E22.1-0309 - Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume Standard

Referenced SEMI Standards

SEMI E1 — Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard

Revision History

SEMI E22-0697 (Reapproved 0309)

SEMI E22-0697 (Reapporved 1102)

SEMI E22-0697 (technical revision)

SEMI E22-91 (first published)


SEMI E22.1-0309 (technical revision)

SEMI E22.1-1296 (Reapproved 1102)

SEMI E22.1-1296 (technical revision)

SEMI E22.1-92 (first published)

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