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SEMI S10-0307 - Safety Guideline for Risk Assessment and Risk Evaluation Process

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published December 1996; previously published November 2003.


The purpose of this guideline is to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. The document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations. Use of this safety guideline is intended to assist in the development of a strategy to prioritize and control risks.

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

Revision History

SEMI S10-0307 (technical revision)

SEMI S10-1103 (complete rewrite)

SEMI S10-1296 (first published)

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