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SEMI MS3-0307 - Terminology for MEMS Technology

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)
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This standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Previously published as SEMI PR11-1105.


NOTICE: This document replaces SEMI PR11-1105 in its entirety.


Micro Electro-Mechanical Systems (MEMS) technology, while related in many ways to integrated circuit and device technology, has many differences as well. Terminology for MEMS, in particular, often differs significantly. To promote common understanding and clear communication among suppliers, customers, and others in the field, these terms should be defined. This terminology document covers definitions of terms used in MEMS technology, especially in those areas of greatest interest to the SEMI community.

Referenced SEMI Standards


Revision History
SEMI MS3-0307 (first published - replaces SEMI PR11)

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