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SEMI AUX005-1101 - Comparison Matrix Between SEMI S2-93A and S2-0200

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


Publication of this document as Auxiliary Information independent of any standards was authorized by a 2/3-majority vote of the North American Environmental Health and Safety (EHS) Committee at a meeting on October 19, 2000. This action was subsequently approved by the global EHS Coordinating Subcommittee by email ballot on October 27, 2000, and by the NA Regional Standards Committee by electronic ballot on November 22, 2000.


The information in this document has been furnished by SEMI ® Standards and the SEMI S2 Comparison Matrix Task Force for informational use only and is subject to change without notice. The comparison matrix between SEMI S2-93A and SEMI S2-0200 is a valuable tool to equipment suppliers, third parties and device manufacturers. It identifies the changes between S2-93A and SEMI S2-0200 and provides readers with insight as to the rationale behind some of the changes. The SEMI S2 Comparison Matrix Task Force’s objective is to compile a full comparison matrix of the official sections of SEMI S2-93A and SEMI S2-0200, soliciting input from the various S2 Working Groups where possible. This document is intended to be used as background information only. It is not the intent of this document to alter the criteria of SEMI S2.

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