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SEMI S2-1016 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

Volume(s): Safety Guidelines;Facilities
Language: English
Type: Single Standards Download (.pdf)
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This Safety Guideline was technically approved by the global Environmental Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www.semiviews.org and www.semi.org in October 2016; originally published in 1991; previously published January 2016.


NOTICE: Paragraphs entitled ‘NOTE’ are not an official part of this Safety Guideline and are not intended to modify or supersede the official Safety Guideline. These have been supplied by the committee to enhance the usage of the Safety Guideline.


NOTICE: This Document contains material that has been balloted and approved by the Environmental Health & Safety Global Technical Committee, but is not immediately effective. This material and the date on which it becomes effective are included in Delayed Revisions Sections 1 & 2. The provisions of this information are not an authoritative part of the Document until their effective dates. The main body of SEMI S2-0715 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may optionally be applied prior to the effective date, providing they do not conflict with portions of the authoritative version other than those that are to be revised or replaced as part of the deferred change, and are labeled accordingly. Material that is to be replaced by revisions that are not yet in effect is preceded by a NOTICE indicating its status.


This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.


Applicability — This Safety Guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.


Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this Safety Guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.

Referenced SEMI Standards

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures

SEMI F15 — Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography (Withdrawn 1011)

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S3 — Safety Guideline for Process Liquid Heating Systems

SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications

SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Revision History

SEMI S2-1016 (technical revision)

SEMI S2-0715a (delayed revision)

SEMI S2-0715 (technical revision)

SEMI S2-0712d (delayed revision)

SEMI S2-0712c (delayed revision)

SEMI S2-0712b (delayed revision)

SEMI S2-0712a (delayed revision)

SEMI S2-0712 (technical revision)

SEMI S2-0310e (delayed revision)

SEMI S2-0310d (delayed revision)

SEMI S2-0310c (delayed revision)

SEMI S2-0310b (delayed revision)
SEMI S2-0310a (delayed revision)
SEMI S2-0310 (technical revision)
SEMI S2-0709 (technical revision)
SEMI S2-0706e (delayed revision)
SEMI S2-0706d (delayed revision)
SEMI S2-0706c (delayed revision)
SEMI S2-0706b (delayed revision)
SEMI S2-0706a (delayed revision)
SEMI S2-0706E (editorial revision)
SEMI S2-0706 (technical revision)
SEMI S2-0703aE (editorial revision)
SEMI S2-0703a (delayed revision)
SEMI S2-0703 (technical revision)
SEMI S2-0303 (technical revision)
SEMI S2-1102 (technical revision)
SEMI S2-0302 (technical revision)
SEMI S2-0200E (editorial revision)
SEMI S2-0200 (complete rewrite)
SEMI S2-93A (technical revision)
SEMI S2-93 (technical revision)
SEMI S2-91 (first published)

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