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SEMI M80-0514 - Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 24, 2014. Available at www.semiviews.org and www.semi.org in May 2014; originally published November 2011; previously published August 2012.


This Standard specifies the front-opening shipping box (FOSB) used to ship 450 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality.


This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring interoperability at all mechanical interfaces.


This Standard assumes that the 450 FOSB is used in loading raw silicon wafers to 450 FOSB after inspection in Si suppliers and also used in acceptance and inspection and transfer to another carrier at device makers. The 450 FOSB is not intended to be used in IC manufacturing processes. It is recommended that wafers be transferred from the 450 FOSB to a 450 FOUP using automated methods.

Revision History

SEMI M80-0514 (technical revision)

SEMI M80-0812 (technical revision)

SEMI M80-1111 (first published)

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