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SEMI E159-0314 - Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
CURRENT - Supported by the technical committee.


Abstract

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in March 2014; originally published June 2011; previously published September 2012.

 

The purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and ship 450 mm wafers, as specified by SEMI M74.

 

This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers.

 

This Document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions.

 

This Standard assumes that the 450 MAC is primarily used during silicon wafer manufacturing and for storage and shipping of processed device wafers, while maintaining wafer quality and allowing automated use of the carrier. It is recommended that wafers be transferred from the MAC to a 450 FOUP and 450 FOUP to MAC, using automated methods.

 

This Document specifies the external features and dimensions of the 450 mm carrier.

 

This Document specifies the interior exclusion volumes for supporting and restraining wafers in the 450 mm carrier.

 

This Document specifies the critical dimensions and locations of the kinematic pins that will support and position the 450 mm carriers.

 

This Document defines three orthogonal reference planes as references for carrier dimensions.


Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)

SEMI E144 — Provisional Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers


Revision History

SEMI E159-0314 (technical revision)

SEMI E159-0912 (technical revision)

SEMI E159-0312 (technical revision)

SEMI E159-0611 (first published)


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