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SEMI E158-0314 - Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
CURRENT - Supported by the technical committee.


Abstract

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in March 2014; originally published July 2010; previously published September 2012.

 

The purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities.

 

This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers.

 

This Document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions.

 

This Document specifies the external features and dimensions of the 450 mm carrier.

 

This Document specifies the interior exclusion volumes for supporting and restraining wafers in the 450 mm carrier.

 

This Document specifies the critical dimensions and locations of the kinematic coupling pins (KCPs) that will support and position the 450 mm carriers.

 

This Document defines three orthogonal reference planes as references for carrier dimensions.


Referenced SEMI Standards

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment

SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers


Revision History

SEMI E158-0314 (technical revision)

SEMI E158-0912 (technical revision)

SEMI E158-0212 (technical revision)

SEMI E158-1110 (technical revision)

SEMI E158-0710 (first published)


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