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SEMI F47-0706 (Reapproved 0812) - Specification for Semiconductor Processing Equipment Voltage Sag Immunity

Volume(s): Equipment Automation Hardware;Facilities
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


This Standard was technically approved by the global Facilities Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in August 2012; originally published September 1999; previously published July 2006.


Semiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags. This Specification defines the voltage sag immunity required for semiconductor processing, metrology, and automated test equipment. This Specification strikes a balance between voltage sag immunity and increased equipment cost.

Referenced SEMI Standards

SEMI E51 — Guide for Typical Facilities Services and Termination Matrix

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

Revision History

SEMI F47-0706 (Reapproved 0812)

SEMI F47-0706 (technical revision)

SEMI F47-0200 (technical revision)

SEMI F47-0999 (first published)

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