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SEMI Downloads
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Volumes(s): Equipment Automation Hardware;Facilities
Language: English
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SEMI F47-0706 (Reapproved 0812) - Specification for Semiconductor Processing Equipment Voltage Sag Immunity |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This Standard was technically approved by the global
Facilities Technical Committee. This edition was approved for publication by the
global Audits and Reviews Subcommittee on June 18, 2012. Available at
www.semiviews.org and www.semi.org in August 2012; originally published
September 1999; previously published July 2006.
Semiconductor factories require high levels of power
quality due to the sensitivity of equipment and process controls. Semiconductor
processing equipment is especially vulnerable to voltage sags. This
Specification defines the voltage sag immunity required for semiconductor
processing, metrology, and automated test equipment. This Specification strikes
a balance between voltage sag immunity and increased equipment
cost. |
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Referenced SEMI Standards |
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SEMI E51 —
Guide for Typical Facilities Services and Termination Matrix
SEMI S2 —
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing
Equipment |
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Revision History: |
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SEMI F47-0706
(Reapproved 0812)
SEMI F47-0706 (technical revision)
SEMI F47-0200
(technical revision)
SEMI F47-0999
(first published) |
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