Welcome to SEMI

SEMI International Standards

SEMI S8-0712 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements
Bookmark and Share
Non Member Pricing
USD $150.00
Member Pricing
USD $113.00



This Safety Guideline was technically approved by the global Environmental, Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 14, 2012. Available at www.semiviews.org and www.semi.org in July 2012; originally published in 1995; previously published November 2008.


These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing equipment.


The purpose of these guidelines is to promote compatibility between the user and the equipment in the manufacturing environment. The following general principles are integral to the ergonomics design and evaluation of equipment:


The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and hazards. Appropriate distribution of tasks will also optimize performance.


Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’ expectations.


The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size, strength, and range of motion characteristics of the user population. Such design will also facilitate task performance.

Referenced SEMI Standards

SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

Revision History

SEMI S8-0712 (technical revision)

SEMI S8-0308E (editorial revision)

SEMI S8-0308 (technical revision)

SEMI S8-0307E (editorial revision)

SEMI S8-0307 (technical revision)

SEMI S8-0705E (editorial revision)

SEMI S8-0705 (technical revision)

SEMI S8-1103 (technical revision)

SEMI S8-0701 (technical revision)

SEMI S8-1000 (technical revision)

SEMI S8-0600E (editorial revision)

SEMI S8-0600 (technical revision)

SEMI S8-0999 (technical revision)

SEMI S8-95A (technical revision)

SEMI S8-95 (first published)

Related Products
Need Access to all SEMI Standards?
Check out SEMIViews our web-based Standards libray.