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SEMI Downloads
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Volumes(s): Equipment Automation Hardware
Language: English
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SEMI E10-0312 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This Standard was technically approved by the global
Metrics Technical Committee. This edition was approved for publication by the
global Audits and Reviews Subcommittee on December 24, 2011. Available at
www.semiviews.org and www.semi.org in March 2012; originally published in 1986;
previously published March 2004.
NOTICE: This Document was completely rewritten in
2011.
This Document establishes a common basis for
communication between users and suppliers of semiconductor manufacturing
equipment by providing a standardized methodology for measuring reliability,
availability, and maintainability (RAM) and utilization performance of equipment
in a manufacturing environment. |
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Referenced SEMI Standards |
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SEMI E35 —
Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor
Manufacturing Equipment
SEMI E58 —
Automated Reliability, Availability, and Maintainability Standard (ARAMS):
Concepts, Behavior, and Services
SEMI E79 —
Specification for Definition and Measurement of Equipment
Productivity
SEMI E116 —
Specification for Equipment Performance Tracking
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Revision History: |
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SEMI E10-0312
(technical revision)
SEMI E10-0304E (editorial revision)
SEMI E10-0304
(technical revision)
SEMI
E10-0701(technical revision)
SEMI
E10-0301(technical revision)
SEMI E10-0600
(technical revision)
SEMI E10-0699E
(editorial revision)
SEMI E10-0699
(technical revision)
SEMI E10-0299
(technical revision)
SEMI E10-96
(technical revision)
SEMI E10-92
(technical revision)
SEMI E10-86
(first published) |
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