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SEMI E10-0312 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Metrics Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1986; previously published March 2004.


NOTICE: This Document was completely rewritten in 2011.


This Document establishes a common basis for communication between users and suppliers of semiconductor manufacturing equipment by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment.

Referenced SEMI Standards

SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI E79 — Specification for Definition and Measurement of Equipment Productivity

SEMI E116 — Specification for Equipment Performance Tracking

Revision History

SEMI E10-0312 (complete rewrite)

SEMI E10-0304E (editorial revision)

SEMI E10-0304 (technical revision)

SEMI E10-0701(technical revision)

SEMI E10-0301(technical revision)

SEMI E10-0600 (technical revision)

SEMI E10-0699E (editorial revision)

SEMI E10-0699 (technical revision)

SEMI E10-0299 (technical revision)

SEMI E10-96 (technical revision)

SEMI E10-92 (technical revision)

SEMI E10-86 (first published)

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