NOTICE: SEMI E30.1 and SEMI E30.5 are no longer published within the SEMI E30 family of standards. They are each published and sold separately on their own pages. SEMI E30.4 was re-designated as SEMI E82 and is published and sold separately on its own page.

This Standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at www.semiviews.org and www.semi.org in June 2011; originally published in 1992; previously published November 2003.

GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment. The GEM standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Equipment suppliers may provide additional SECS-II functionality not included in GEM as long as the additional functionality does not conflict with any of the behavior or capabilities defined in GEM. Such additions may include SECS-II messages, collection events, alarms, remote command codes, processing states, variable data items (data values, status values or equipment constants), or other functionality that is unique to a class (etchers, steppers, etc.) or specific instance of equipment.

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E139 — Specification for Recipe and Parameter Management (RaP)

SEMI E30-0611 (technical revision)