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SEMI S6-0707E - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007. Originally published in 1993.


E This standard was editorially modified in June 2009 to correct an error. Changes were made to § A1-


NOTICE: This document was completely rewritten in 2007.


This safety guideline provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria. The optimization of exhaust ventilation is becoming more important as energy efficiency and the physical constraints of exhaust ventilation utilities in user facilities become more pronounced. Efficiently designed exhaust ventilation should be provided to protect personnel, property, and the environment from health and safety risks. The purpose of this safety guideline is to provide performance and design principles and test methods and criteria for exhaust ventilation.

Referenced SEMI Standards

SEMI F5 — Guide for Gaseous Effluent Handling
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation of Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Revision History

SEMI S6-0707E (editorial revision)

SEMI S6-0707 (complete rewrite)

SEMI S6-93 (first published)

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