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SEMI S6-0707E - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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This Safety Guideline was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. Available at www.semi.org in July 2007; originally published in 1993.


E This Standard was editorially modified in June 2009 to correct an error. Changes were made to § A1-


NOTICE: This Document was completely rewritten in 2007.


NOTICE: Conformance to the ‘should’ provisions of this Safety Guideline is necessary to declare conformance to this Document. Conformance to ‘may’, ‘suggested’, ‘preferred’, ‘recommended’, ‘NOTE’, or ‘Related Information’ provisions is not necessary to declare conformance.


This Safety Guideline provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria.


The optimization of exhaust ventilation is becoming more important as energy efficiency and the physical constraints of exhaust ventilation utilities in user facilities become more pronounced. Efficiently designed exhaust ventilation should be provided to protect personnel, property, and the environment from health and safety risks. The purpose of this Safety Guideline is to provide performance and design principles and test methods and criteria for exhaust ventilation.


This guideline applies to semiconductor manufacturing equipment that incorporates exhaust ventilation intended to be connected to user facilities’ exhaust ventilation system(s).


The criteria of this Document should be applied to exhaust ventilation systems provided for the purposes (in whole or in part) of personnel protection, equipment protection, and fire risk reduction.


The performance and assessment criteria in this Document apply to all of the equipment provided by a supplier to a user or to another supplier to be provided as part of equipment the latter supplier provides to a user.


This Document is intended to help the semiconductor equipment supplier design equipment exhaust ventilation systems to a common set of performance criteria as well as to provide assistance to both users and suppliers in the understanding of exhaust ventilation requirements for equipment systems. It is not intended to establish design specifications.

Referenced SEMI Standards

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation of Semiconductor Manufacturing Equipment

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Revision History

SEMI S6-0707E (editorial revision)

SEMI S6-0707 (complete rewrite)

SEMI S6-93 (first published)

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